▷ 제목:  3D Metamaterials for Various Applications

▷ 내용: The mass production of precise three-dimensional (3D) nanostructures has long been an ultimate goal for the fabrication technology of metamaterial whose material properties are mostly determined by structural factors in sub-micron and nano scale. While proximity-field nanopatterning (PnP) provides partial solutions, limited range of realizable structures and symmetries remain as main problems. Here, we overcome these challenges by implementing an inverse design to the PnP process, as shown in Figure 1. Our inverse design platform based on the adjoint method can efficiently find optimal phase masks for diverse target lattices and motifs. We fabricate rectangular array nanochannels with a phase mask and normally incident UV light, which have been impossible by conventional PnP (hexagonal array nanochannels). It is 2D inverse design as a proof-of-concept study. With further demonstration of material conversion, we will discuss further possibility of those designed 3D nanostructures for various applications with new material properties, especially in the field of nanomechanics, Li-ion batteries, thermoelectrics, optical transmission modulation, and neuromorphic semiconductor devices.